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One aspect of the research for new gate electrode materials is that they may be required for use on either silicon dioxide (SiO2) gate dielectrics or on the high-κ gate dielectrics that are being developed to replace SiO2
unified system envisioned for the future in which common reading equipment can be used throughout the plant
SEMI E5-94 (technical revision)
previously published March 2015
each CSB needs to be chained with the public rootCA
E06200 - SEMI E62 - Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) Revision:SEMI E62-1105 - Superseded One aspect of the researchNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the tool side of the interface between a process or metrology tool and a front opening box. This Standard is intended to set an appropriate level of specification that places minimal limits on